Semiconductor Robotics

Precision wafer transfer, handling, and automation for Class 1 cleanroom environments.

Explore

55+

Robot Types

OEM

Samsung & SK Hynix

Class 1

Cleanroom

Lineup

Semiconductor Robot Lineup

Since founding the company with its semiconductor business, Robots and Design has been relentlessly striving to create the best products for over 20 years.

With know-how accumulated through two decades of research and experience, we provide solutions tailored to diverse environments according to customer needs. As a result, we maintain the No. 1 position in domestic semiconductor robot sales.

Our semiconductor robots deliver fast and precise motion through stable structure and control methods.

Robot

Wafer transfer, vacuum, LED, glass, FOUP handling, and reticle/mask robots for diverse semiconductor processes.

Module

FOUP openers, cassette loaders, SMIF interfaces, and pre-aligners for load port and alignment systems.

System

Equipment Front End Modules (EFEM) with optimized cleanroom airflow and high throughput.

Robot

Wafer Transfer

Standard WTR Single/Dual arm, 8–12 inch Class 1 cleanroom wafer transfer → Flip Robot 180° arm flipping, 8–12 inch wafers, single or dual flip → Telescopic Robot 2–3 step telescopic, up to 1,200mm vertical stroke, 8–12 inch wafers → SCARA Robot Single/Dual arm, 12 inch, wide range without traverse axis →

Cartesian & Specialty

Cartesian Unit Robot Cartesian coordinates structure for all axes, high speed handling → Cartesian Z axis Robot Gantry / Non-Gantry type, short tact time, lower passline → Wet Robot Bellows & Teflon coated, designed for wet/humid chemical environments → Variable Pitch WTR 6–25mm variable pitch, handles 5 wafers simultaneously →

FOUP & Material Handling

FOUP Handling Robot AGV-mounted SCARA arm, 25kg payload, wide motion range → FOUP Transfer Unit 25-slot FOUP transfer to stocker, smooth vertical traverse axis →

Specialty Robots

Cylindrical Type Robot Cylindrical Z axis with link structure for LED wafer transfer, 2–8 inch → 18 inch Wafer Transfer Robot Clean robot handling 18 inch wafers, 2-step Z axis, 8–18 inch → Long SCARA Robot Extended reach up to 417 WPH, SCARA link with Cartesian Z axis → Reticle/Mask Handling Robot 150×150 reticle/mask with specially designed gripper, flip available →

LED / LCD / FPD

Glass Transfer Robot (LTR) LCD/FPD glass handling, 2–4 gen, vacuum chuck with parallel end-effector → LED Wafer Transfer Robot Compact & lightweight, 2–6 inch sapphire wafer handling for LED processes →

Vacuum Application

Vacuum Robot Magnetic fluid seal, servo motors, 1E-6Pa vacuum, 12 inch wafers →

Module

Aligners & Interface

Pre-aligners CCD (XYR/XZR type), warpage, and edge grip aligners, 2–12 inch, ±0.1mm → SMIF (Standard Mechanical Interface) Ergonomic I/O for 150–200mm wafer pod loading and unloading →

Load Port / Loader

FOUP Opener RS-232 interface, 12/18 inch FOUP, presence & protrusion sensors, mapping → Cassette Loader 8/12 inch cassette loading & docking, ring frame alignment, lift-up cover →

System

EFEM

EFEM (Equipment Front End Module) RE-2P/3P/4P models, clean room robot with FFU, Class 0.1μm, integrated loadport & aligner →

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