SCARA Robot

Wafer Transfer

Robots and Design's SCARA Robot is a horizontal articulated robot optimized for high-speed pick-and-place operations. It is suitable for 300mm wafer transfer and handling using single/dual arm or multi-blade configurations.

*Optional: Linear Track, Mapping Sensor

Transfer 12 inch Wafer
Single Arm with 1 or 2 Blade
Wide range without traverse axis (track)
Fast & Precise Motion Robot
Port Application: 2 port base (3 Port possible if arm modified)
Customization available when requested

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Specification
	Scara Single	Scara Dual
Motion Range
X axis	±798 mm	±798 mm
Θ axis	330 deg	330 deg
Roll 1,2	360 deg	360 deg
Z axis	300 mm	300 mm
Performance - Max Speed
X axis	360 deg/sec	360 deg/sec
Θ axis	226 deg/sec	226 deg/sec
Roll 1,2	500 deg/sec	500 deg/sec
Z axis	750 mm/sec	750 mm/sec
Repeatability
X axis	±0.1 mm	±0.1 mm
Θ axis	±0.1 deg	±0.1 deg
Roll 1,2	±0.1 deg	±0.1 deg
Z axis	±0.1 mm	±0.1 mm
General
Wafer Size	12" wafers
Control Axis	4	5
Arm Type	Single Arm	Dual Arm
Blade Thickness	≤ 3mm
Cleanliness	Class 1 @ 0.1µm
Load Capacity	1 kgf (Including Gripper)
Weight	45 kgf	45 kgf
Cable Length (Robot - Controller)	3m (Standard)
Power (Controller)	AC220/230V ±10% 1Phase, 50/60 Hz, 6A, 1.2Kva
Air	0.25~0.5MPa, Ø4mm
Vacuum	-66.7 kPa, Ø6mm
Operating Temp.	0~40 °C

SCARA Robot

SCARA Robot

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