Cartesian Z axis Robot

Cartesian WTR

Robots and Design's Cartesian Z axis Robot is a combination of Cartesian Z axis and link structure, available in Gantry or Non-Gantry type configurations. Designed for high speed and precise wafer handling with short tact time, it is suitable for lower passline applications.

Combination of Cartesian Z axis & link structure (Gantry or Non-Gantry type)
High speed and precise wafer handling
Short tact time and increase of throughput
Available to use in lower passline

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Specification
	Gantry Type	Non-Gantry Type
Motion Range
R1,R2 axis (Extension)	680 mm	560 mm
T axis (Rotation)	330 deg	210 deg
Z axis (Up/down)	1550 mm	1100 mm
X axis (Traverse) Optional	○	○
Performance - Max Speed
R1,R2 axis (Extension)	247 deg/sec	247 deg/sec
T axis (Rotation)	211 deg/sec	211 deg/sec
Z axis (Up/down)	500 mm/sec	500 mm/sec
X axis (Traverse)	1000 mm/sec	1000 mm/sec
Repeatability
R1,R2 axis (Extension)	±0.05 mm	±0.1 mm
T axis (Rotation)	±0.01 deg	±0.1 deg
Z axis (Up/down)	±0.05 mm	±0.1 mm
X axis (Traverse)	±0.02 mm	±0.1 mm

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