Arm link structure with cylindrical long Z axis for LED wafer transfer.
Robots and Design's Cylindrical Type Robot features an arm link structure with a cylindrical type long Z axis for LED wafer transfer. It delivers fast and precise motion at low cost, with a small footprint, easy operation and maintenance, and wide operation range.
| Parameter | Single Arm | Dual Arm | |
|---|---|---|---|
| Motion Range | |||
| R1,R2 axis (Extension) | 530 mm | 530 mm | |
| T axis (Rotation) | 330 deg | 330 deg | |
| Z axis (Up/down) | 600 mm | 600 mm | |
| Max Speed | |||
| R1,R2 axis (Extension) | 288 deg/sec | 288 deg/sec | |
| T axis (Rotation) | 733 mm/sec | 733 mm/sec | |
| Z axis (Up/down) | 500 mm/sec | 500 mm/sec | |
| Repeatability | |||
| R1,R2 axis (Extension) | ±0.1 mm | ±0.1 mm | |
| T axis (Rotation) | ±0.02 deg | ±0.02 deg | |
| Z axis (Up/down) | ±0.1 mm | ±0.1 mm | |
| General | |||
| Wafer Size | 2~8" | ||
| Control Axis | 3 | 4 | |
| Arm Type | Single Arm | Dual Arm | |
| Blade Thickness | ≤ 3mm | ||
| Cleanliness | Class 1 @ 0.1µm | ||
| Load Capacity | 0.7 kgf (Including Gripper) | ||
| Cable Length (Robot - Controller) | 3m (Standard) | ||
| Power (Controller) | Single Phase AC220V ±10%, 10A | ||
| Air | More than 0.4~0.5MPa, Φ4mm | ||
| Vacuum | Less than -50 kPa | ||
| Operating Temp. | 0~40 °C | ||
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