Cartesian Unit Robot

Cartesian WTR

Robots and Design's Cartesian Unit Robot uses a Cartesian coordinates structure for all axes, enabling high speed and precise wafer handling. It can be manufactured from a single Z-axis type to a multi type with up to 5 axes.

*Optional: Traverse axis, Step availability (1 to 3 steps), Mapping Sensor

Cartesian coordinates structure for all axes
High speed and precise wafer handling
Short tact time and increase of throughput
Available to use in lower passline

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Cartesian Unit Robot — Specification
	Cartesian Unit Robot
Motion Range
R1,R2 axis (Extension)	680 mm
T axis (Rotation)	330 deg
Z axis (Up/down)	1550 mm
X axis (Traverse) Optional	○
Performance - Max Speed
R1,R2 axis (Extension)	247 deg/sec
T axis (Rotation)	235 deg/sec
Z axis (Up/down)	555 mm/sec
X axis (Traverse)	1500 mm/sec
Repeatability
R1,R2 axis (Extension)	±0.05 mm
T axis (Rotation)	±0.01 deg
Z axis (Up/down)	±0.05 mm
X axis (Traverse)	±0.02 mm

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