EFEM (Equipment Front End Module)
Robots and Design's EFEM is a module responsible for wafer loading in process equipment. The EFEM includes three units: Loading Unit (Loadport - FOUP Opener), Handler (Wafer Transfer Robot), and Pre-aligner. These three units work together to transfer wafers to the process section. When a clean robot is installed on the pre-aligner, the installation footprint is reduced for efficient space utilization. The clean robot with an end-effector on the rotary axis operates without a transverse axis for high throughput, and air-flow simulation of the clean robot ensures a high level of cleanliness.
- Integrating pre-aligner with clean robot results in small footprint
- Clean robot with end-effector on rotary axis operates without traverse axis for high throughput
- Clean robot's air-flow simulation optimizes and ensures high level of cleanliness
Configuration: Loadport (Mapping), Single or Dual Arm Robot, Linear Track, Enclosure structure with Fan Filter Unit and Area Sensor, System Software, System Electrics, Options (Wafer Aligner, Ionization System, PIO Sensor, RFID Reader/Writer, Edge Grip Blades, Teaching Pendant)
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