Ultra-high vacuum robot with magnetic fluid seal for contamination-free handling.
Robots and Design's Vacuum Robot is optimized for ultra-high vacuum environments (1E-6Pa). All axes are equipped with servo motors, and magnetic fluid seals are used for vacuum compatibility. The rotation diameter is minimized while extension is maximized.
| Branch Structure | Boomerang Structure | |
|---|---|---|
| Motion Range | ||
| R1,R2 axis (Extension) | 1100 mm | 800 mm |
| T axis (Rotation) | ±185 deg at origin position | ±185 deg at origin position |
| Z axis (Up/down) | 0~+104 mm | 0~+104 mm |
| Performance - Max Speed | ||
| R1,R2 axis (Extension) | 120 deg/sec | 240 deg/sec |
| T axis (Rotation) | 120 deg/sec | 240 deg/sec |
| Z axis (Up/down) | 42 mm/sec | 42 mm/sec |
| Repeatability | ||
| R1,R2 axis (Extension) | ±0.1 mm | ±0.1 mm |
| Z axis (Up/down) | ±0.05 mm | ±0.05 mm |
| General | ||
| Wafer Size | 12" wafer | 12" wafer |
| Control Axis | 4 | 4 |
| Arm Type | Dual Arm | Dual Arm |
| Blade Thickness | ≤ 3mm | ≤ 3mm |
| Load Capacity | 1.5 kg | 1.5 kg |
| Cable Length (Robot - Controller) | 3m (Standard) | 3m (Standard) |
| Power (Controller) | Single Phase AC208V ±10%, 5A | Single Phase AC208V ±10%, 5A |
| Communication | RS232C | RS232C |
| Operating Pressure | Atmospheric pressure~10−6 Pa | Atmospheric pressure~10−6 Pa |
The Load Lock Chamber controls the vacuum when transferring wafers in and out between vacuum chambers and atmospheric equipment (EFEM).
The Transfer Module Chamber integrates a vacuum robot with multiple side ports for process module connections, with comprehensive wafer detection sensors.
A complete vacuum processing system integrating EFEM, Load Lock, and TM Chamber for 300mm wafer processing with dual arm vacuum robot.
| Cluster Tool | |
|---|---|
| General Info | |
| Wafer Size | 300 mm |
| Configuration | EFEM, Load Lock, TM Chamber |
| Dimension | 1,180(W) × 1,190(D) × 1,190(H) |
| Valve | Vacuum Slot Valve |
| LIP | Manual Gear Type |
| Passline | 1,100 mm |
| Utility | |
| Vacuum | 1×10E-2 ~ 5×10E-2 |
| Vent | Nitrogen |
| PCW | Nominal 40 Psi |
| CDA | 5 kg/cm² |
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