Module
SMIF (Standard Mechanical Interface)
Robots and Design's SMIF features ergonomically designed I/O that easily integrates with various 150-200mm wafer processing and measurement equipment, enabling pod cassette loading and unloading. It is designed to be suitable for vacuum load-lock equipment or for equipment manufacturer sales. SMIF-LP provides SMIF functionality for various wafer fab equipment, allowing reduced cycle time and installation footprint.
- Ergonomically designed I/O easily integrates SMIF
- Pod cassette loading and unloading for 150~200mm wafer processing and metrology tools
- Designed to be adaptive for vacuum load-lock tools
- SMIF-LP provides capability for wide variety of wafer fab tools with reduced cycle time and footprint