Semiconductor

FOUP Handling Robot

AGV-mounted SCARA arm robot for 12-inch FOUP handling with 25kg payload.

FOUP Handling Robot
FOUP Handling Robot Specifications
Robot

FOUP Handling Robot

Robots and Design's FOUP Handling Robot is mounted on an AGV (Automated Guided Vehicle) to handle 12-inch FOUPs. With a maximum payload of 25kg and a SCARA arm, it provides a wide range of motion.

  • 12 inch FOUP handling
  • Mounted to AGV (Automated Guided Vehicle)
  • 25 kg of payload maximum
  • Wide motion range with SCARA arm structure
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Specification
FOUP Handling Robot
Motion Range
R axis (Arm)900 (615 + 285) mm
T axis (Rotation)360 deg
Z axis (Up/down)250 mm
Performance - Max Speed
R axis (Arm)118 deg/sec (Wrist) / 151 deg/sec (Elbow)
T axis (Rotation)188 deg/sec
Z axis (Up/down)500 mm/sec
General
Repeatability±0.10 mm
Handling Object300mm 25 Slot FOUP, Ring Frame Cassette
Control Axis5
Arm TypeSCARA
CleanlinessClass 10
Load Capacity15 kgf
WeightAbout 70 kgf
Cable Length (Robot - Controller)3m (Standard)
Power (Controller)DC12 or 24V (using 1Kw DC-AC converter)
CommunicationEthernet

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