Standard WTR

Wafer Transfer

Robots and Design's Standard WTR is a robot designed for Class 1 cleanroom applications, transferring 300mm wafers (8" & 12") quickly and precisely using single/dual arm or multi-blade configurations. End-effectors include vacuum blade and edge gripper options, with custom manufacturing available upon request (Flip WTR, Wet WTR, etc.).

*Optional: Linear Track, Mapping Sensor

Transfer 12" Wafer
Clean room Application
ODM or OEM Supply
Single & Dual arm / Multi Blade Type
Fast & Precise Motion Robot
0.1 micron meter CLASS 1 Cleanliness
Various End-Effector: Vacuum Blade, Edge Gripper
Linear Track, Mapping Sensor (Optional)
Customization available when requested

Download Brochure

Specification
	8" WTR Single	8" WTR Dual	12" WTR Single	12" WTR Dual
Motion Range
R1,R2 axis (Extension)	510 mm	510 mm	645 mm	645 mm
T axis (Rotation)	330 deg	330 deg	330 deg	330 deg
Z axis (Up/down)	200 mm	200 mm	300 mm	300 mm
X axis (Traverse) Optional	○	○	○	○
Performance - Max Speed
R1,R2 axis (Extension)	247 deg/sec	247 deg/sec	247 deg/sec	247 deg/sec
T axis (Rotation)	211 deg/sec	211 deg/sec	211 deg/sec	211 deg/sec
Z axis (Up/down)	500 mm/sec	500 mm/sec	500 mm/sec	500 mm/sec
X axis (Traverse) Optional	1000 mm/sec	1000 mm/sec	1000 mm/sec	1000 mm/sec
Repeatability
R1,R2 axis (Extension)	±0.1 mm	±0.1 mm	±0.1 mm	±0.1 mm
T axis (Rotation)	±0.02 deg	±0.02 deg	±0.02 deg	±0.02 deg
Z axis (Up/down)	±0.1 mm	±0.1 mm	±0.1 mm	±0.1 mm
X axis (Traverse) Optional	±0.1 mm	±0.1 mm	±0.1 mm	±0.1 mm
General
Wafer Size	8 inch		12 inch
Control Axis	3	4	3	4
Arm Type	Single Arm	Dual Arm	Single Arm	Dual Arm
Blade Thickness	≤ 2.5mm		≤ 3mm
Cleanliness	Class 1 @ 0.1µm
Load Capacity	1 kgf (Including Gripper)
Weight	32 kgf	32 kgf	35 kgf	35 kgf
Cable Length (Robot - Controller)	3m (Standard)
Power (Controller)	Single Phase AC208 ±10%, 50/60Hz
Air	More than 0.4~0.5MPa, Φ4mm
Vacuum	Less than -50 kPa
Operating Temp.	0~40 °C

Standard WTR

Standard WTR

Ready to Work Together?