Module

FOUP Opener

Robots and Design's FOUP Opener uses an RS-232 communication interface and includes FOUP presence, placement, and protrusion sensors with mapping functionality. The 12" SEMI compliant FOUP, 18" FOUP, and 12" ring frame wafer MAC FOUP are individually designed with modular construction for rapid swap-out service.

*Option: adaptor for 8" cassette, RFID, etc.

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Variants

FOUP Opener Models

01

12" FOUP (Standard)

CE, S2, SEMI compliant. Compatible with all 12" FOUPs and 8" cassettes via adaptor. FOUP pinch point protection included.

02

12" FOUP with N2 Purge

N2 purge capability for inert atmosphere control during FOUP opening and wafer access.

03

18" FOUP

Designed for 450mm (18") next-generation wafer FOUP handling.

04

For FOUP Cleaning Tool

Specialized opener variant designed for FOUP cleaning equipment integration.

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