Wafer Transfer
Variable Pitch WTR
Robots and Design's Variable Pitch WTR is a multi-blade type robot that can exchange 5 wafers at once. With fast processing speeds, it achieves throughput tailored to customer requirements. Additionally, its variable pitch design allows operation in environments with different wafer pitches.
*Optional: Linear Track, Mapping Sensor
- 6~25mm pitch variation (Accessible to different pitch of cassettes)
- Easy Maintenance
- Multi-chuck wafer transfer (5 wafer/time)
- Single wafer transfer (1+4 Blade type)
- Wafer mapping (Optional)
- High reliability
- Customization for customer's needs