Flip Robot

Wafer Transfer

Robots and Design's Flip Robot is a single or dual arm robot handling 8-12 inch wafers with a 180° arm flipping function (single or dual flip). Options include mapping function, smart motion, and linear track (linear motor type, belt type, ball screw type, rack pinion type).

Single or Dual arm Robot
Handling 8~12" wafers
180° Arm flipping function: Single or Dual flip
Options: Mapping function, Smart motion, Linear Track (Linear motor type, belt type, ball screw type, Rack pinion type)

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Specifications
Parameter	12" S-Flip	12" D-Flip
Motion Range
R1,R2 axis (Extension)	600 mm	600 mm
T axis (Rotation)	330 deg	330 deg
Z axis (Up/down)	300 mm	300 mm
X axis (Traverse) Optional	○	○
Max Speed
R1,R2 axis (Extension)	300 deg/sec	300 deg/sec
T axis (Rotation)	211 deg/sec	211 deg/sec
Z axis (Up/down)	500 mm/sec	500 mm/sec
X axis (Traverse) Optional	1000 mm/sec	1000 mm/sec
Repeatability
R1,R2 axis (Extension)	±0.1 mm	±0.1 mm
T axis (Rotation)	±0.02 deg	±0.02 deg
Z axis (Up/down)	±0.1 mm	±0.1 mm
X axis (Traverse) Optional	±0.1 mm	±0.1 mm
General
Wafer Size	8~12"
Control Axis	4	5
Arm Type	Single Arm	Dual Arm
Blade Thickness	≤ 3mm
Cleanliness	Class 10
Load Capacity	1 kgf (Including Gripper)
Weight	35 kgf
Cable Length (Robot - Controller)	3m (Standard)
Power (Controller)	Single Phase AC208 ±10%, 50/60Hz
Air	More than 0.4~0.5MPa, Φ4mm
Vacuum	Less than -50 kPa
Operating Temp.	0~40 °C

Flip Robot

Flip Robot

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