Precise 150x150 reticle/mask handling with custom gripper and flipping capability.
Robots and Design's Reticle/Mask Handling Robot can handle 150x150 reticles/masks using a specially manufactured gripper. Reticle/mask flipping is also possible.
| Reticle/Mask | |
|---|---|
| Motion Range | |
| R axis (Extension) | 645 mm |
| T axis (Rotation) | 330 deg |
| Z axis (Up/Down) | 200 mm |
| X axis (Traverse) Optional | O |
| Max Speed | |
| R axis (Extension) | 72 deg/sec |
| T axis (Rotation) | 106 deg/sec |
| Z axis (Up/Down) | 250 mm/sec |
| X axis (Traverse) | 750 mm/sec |
| Repeatability | |
| R axis (Extension) | ±0.1 mm |
| T axis (Rotation) | ±0.02 deg |
| Z axis (Up/Down) | ±0.1 mm |
| X axis (Traverse) | ±0.1 mm |
| General | |
| Load Capacity | 3 kg (including gripper) |
Contact us to discuss your automation needs.
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