LED Wafer Transfer Robot

LED Wafer Transfer

Robots and Design's LED Wafer Transfer Robot is designed for transferring sapphire wafers used in LED manufacturing. Single/dual arm configurations are available, and it is suitable for handling wafers of various sizes.

Specialized Robot for LED wafer handling
Compact size & Light weight Design
Handling 2~6 inch of sapphire wafer for LED process
Different size wafer compatible without mechanical conversion
Minimized rotation diameter for downsizing equipment
Customization available when requested

*Optional: Linear Track, Mapping Sensor

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Specification
	Single Arm	Dual Arm
Motion Range
R axis (Extension)	470 mm	470 mm
Θ axis (Rotation)	330 deg	330 deg
Z axis (Up/Down)	200 mm	200 mm
Maximum Speed
R axis	640 mm/sec
Θ axis	180 deg/sec
Z axis	240 mm/sec
Repeatable Accuracy
R axis	±0.1 mm
Θ axis	±0.1 deg
Z axis	±0.1 mm
General
Min. Diameter of Rotation	460 mm	430 mm
Noise Generation	≤ 70 dB
Cleanliness	Class 1 @ 0.1μm
Robot Body Material	Anodized Aluminum (8±2 μm)
Blade Material	Ceramic ≤2 mm
Power (Controller)	Single Phase AC 220V ±10%, 10A
Air Supply	More than 0.4~0.5 MPa, Ø4 mm
Vacuum Supply	Less than -50 kPa
Weight	Approx. 18 kgf
Payload	0.7 kgf (Including Gripper)
End-Effector Grip Type	Vacuum
Wafer Mapping (Option)	Laser Sensor

LED Wafer Transfer Robot

LED Wafer Transfer Robot

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