Module
Cassette Opener
Robots and Design's Cassette Opener modules are available in multiple configurations: Cassette + Metal type, Metal Cassette type, MAC Loader type, and Multi-Carrier type. Designed for 200-300mm wafer processing equipment, these modules provide reliable cassette loading, unloading, and wafer access for batch processing environments.
- Designed for cassette for 8 or 12" ring frame wafer
- Cassette loading & docking are available
- Ring frame alignment function
- Cassette presence sensor is included
- Manual or automatic lift-up cover
- Option: RFID, Multi-cassette handling, etc.