Semiconductor

Long SCARA Robot

Overhang type with extended reach and Cartesian Z axis link for high-throughput wafer handling.

Long SCARA Robot
Wafer Transfer

Long SCARA Robot

Robots and Design's Long SCARA Robot features an overhang-type design with an extended reach, utilizing a Cartesian Z axis link structure. It achieves throughput of up to 417 WPH, making it ideal for high-volume semiconductor manufacturing processes requiring fast and precise wafer transfer over longer distances.

  • Extended motion range without traverse axis
  • Save space and simplify system configuration (One robot for multiple stages)
  • Use SCARA link with Cartesian Z axis
  • Achieve high speed of wafer transferring up to 417 WPH

*Optional: Linear Track, Mapping Sensor

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Specification
Long SCARA
Motion Range
R axis (Extension)680 mm
T axis (Rotation)170 mm (Roll1: 165 mm, Roll2: 275 mm)
Z axis (Up/Down)130 mm
Max Speed
R axis (Extension)600 deg/sec (Wrist), 450 deg/sec (Elbow)
T axis (Rotation)286 deg/sec
Z axis (Up/Down)500 mm/sec
Repeatability
R axis (Extension)±0.1 mm
T axis (Rotation)±0.05 deg
Z axis (Up/Down)±0.1 mm
General
Load Capacity2 kg (including gripper)

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