FOUP Transfer Unit

Robot

The FOUP Transfer Unit transfers FOUPs containing 25 of 300mm wafers to stocker with smooth and precise mechanism. Vertical traverse axis allows transfer from low and high positions. Load capacity is 10kg.

Transfer FOUP containing 25 of 300mm wafers to stocker
Smooth and precise mechanism
10 kg of load capacity
Vertical traverse axis allows transfer from low and high position

Download Brochure

Specification
	FOUP Transfer Unit
Operation Range
Z axis (Up/Down)	2163 mm
Y axis (Traverse)	505 mm (2 FOUP)
X axis (In/Out)	+354 ~ -396 mm
Transfer Speed
Z axis (Up/Down)	300 mm/sec
Y axis (Traverse)	500 mm/sec
X axis (In/Out)	90 deg/sec
Repeatability
Z axis (Up/Down)	±0.20 mm
Y axis (Traverse)	±0.10 mm
X axis (In/Out)	±0.20 mm
General
Load Capacity	10 kg (300mm 25 slot FOUP)
Cleanliness	Clean Class 10

Ready to Work Together?

Get in Touch