:::::::: Robots and Design Co., Ltd. ::::::::::
 
 
:: 사업영역/제품 :: Semiconductor :: System
 
  EFEM(Equipment Front End Module)
  글쓴이 : master     날짜 : 00-00-00 00:00     조회 : 2453    

 
  • Integrating a prealigner with a clean robot results in a small footprint and allows space to be used with great efficency
  • Clean robot with an end-effector on a rotary axis operates without a traverse axis contributin to a high throughput
  • Clean robot's air-flow simulation optimizes and ensures high level of cleanliness
 

Model

RE-2P

RE-3P

RE-4P

Loadport 

2 ports

3 ports

4 ports

Size

1,355x760x2,000 mm

1,860x678x2,000 mm

2,365x678x2,000 mm

Weight

250kg

350kg

450kg

Height

2000 mm ~ 2800 mm

Width

1650 mm ~ 1854 mm (at 3 PODs)

Depth

678 mm

Weight

Less than 480 kg

Carrier

300mm FOUP (SEMI E14.7 – 1101 Compliance)

Cleanliness

Class @ 0.1 (PEFE)

Laminar Flow Recovery Time

Less than 1 minute

Repeatability

Less than 0.1mm @ 3 sigma

Alignment Accuracy/Time

±0.05 Degree/ 6 sec

Electric Supply

220V ± 10% (60Hz, 1Φ) 3 wires + ground, no neutral

Acoustic Noise

Less than 65db

Communication

Ether-Net (HSMS)



분류
· EFEM· Cluster Tool· Decapsulation Equipment
· Deprocess Equipment· Equipment for Optical Filter Assembly
번호 이미지 제목 글쓴이 날짜 조회
2 Cluster Tool
...
master 00-00 1725
1 EFEM(Equipment Front End Module)
...
master 00-00 2454