:::::::: Robots and Design Co., Ltd. ::::::::::
 
 
:: 사업영역/제품 :: Semiconductor :: Semiconductor Robot
 
  [Telescopic Robot] TELESCOPIC TYPE WTR : 2 STEP/3 STEP
  글쓴이 : master     날짜 : 00-00-00 00:00     조회 : 7757    

  • Low noise, fast and precise motion
  • Maximum 1,200mm vertical stroke (Z-Stroke) is achieved.
  • Edge Grip type 2 step/3step telescopic robot
  • Dual Arm/ Multi-blade available
  • 0.1 µm CLASS 1 Cleanliness
  • 0.1 mm of repeatability
  • Avaiable for wafer gripping sensor to check water presence
  • Linear Track, Mapping sensor are optional
 
 
 
 

MODEL

RW-TS-2320

RW-TS-3320

Controlled Arm

4 ( 2 step)

5 (3 step)

Wafer size

~12”

Load Capacity

1.0 kgf

Motion Range

R1,R2 axis(In/Out)

651 mm

T axis(Turning)

330 deg

Z axis(Up/Down)

1050 mm

1200 mm

Transfer Speed

R1,R2 axis(In/Out)

1050 mm/sec

T axis(Turning)

196 deg/sec

Z axis(Up/Down)

1200 mm/sec

Repeatability

R1,R2 axis(In/Out)

±0.1 mm

T axis(Turning)

±0.02 deg

Z axis(Up/Down)

±0.1 mm

Actuator

All Axes

BLDC Motor with abs. Encoder



분류
· 200mm Standard Wafer Transfer Robot· 300mm Standard Wafer Transfer Robot· SCARA Robot
· Telescopic Robot· Variable Pitch WTR· Vacuum Robot
· Multi-Blade Robot· Wet Robot· Catesian Unit Type Robot
· Cylindral Robot· End-effector
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