
Maximum 875 mm of R-axis extension
Z axis extends from top to bottom
190 deg of flipping hand
Wafer Gripping Method: Edge Grip
Customization available when requested
Item
|
Specfication
|
Carrying Object
|
300mm Wafer
|
End-effectors
|
Ceramic (Edge Grip)
|
Controlled Axis
|
4 Axis
|
Arm Type
|
Single arm
|
Motion Range
|
R-Axis (Extenstion)
|
875 mm (Stroke : 710mm)
|
¥è-Axis (Rotation)
|
330 deg
|
Z-Axis (Up/Down)
|
550 mm
|
W-Axis (Flipping)
|
190 deg
|
Repeatability
|
R-Axis (Extenstion)
|
¡¾ 0.1 mm
|
¥è-Axis (Rotation)
|
¡¾ 0.05 deg
|
Z-Axis (Up/Down)
|
¡¾ 0.05 mm
|
W-Axis (Flipping)
|
¡¾ 0.1 deg
|
Maximum Speed
|
R-Axis (Extenstion)
|
400 mm / sec
|
¥è-Axis (Rotation)
|
180 deg/set
|
Z-Axis (Up/Down)
|
300 mm/sec
|
W-Axis (Flipping)
|
180 deg/sec
|
Minimum Rotation Diameter
|
640 mm
|
Cleanliness
|
ISO class 10
|
Payload
|
0.8 kg
|
Utility
|
Power
|
AC220V ¡¾10% 15A
|
Vacuum
|
-50kPa or more
|
Weight
|
Approx. 70kgf
|