Maximum 875 mm of R-axis extension
Z axis extends from top to bottom
190 deg of flipping hand
Wafer Gripping Method: Edge Grip
Customization available when requested
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Item
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Specfication
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Carrying Object
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300mm Wafer
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End-effectors
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Ceramic (Edge Grip)
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Controlled Axis
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4 Axis
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Arm Type
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Single arm
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Motion Range
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R-Axis (Extenstion)
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875 mm (Stroke : 710mm)
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θ-Axis (Rotation)
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330 deg
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Z-Axis (Up/Down)
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550 mm
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W-Axis (Flipping)
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190 deg
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Repeatability
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R-Axis (Extenstion)
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± 0.1 mm
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θ-Axis (Rotation)
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± 0.05 deg
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Z-Axis (Up/Down)
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± 0.05 mm
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W-Axis (Flipping)
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± 0.1 deg
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Maximum Speed
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R-Axis (Extenstion)
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400 mm / sec
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θ-Axis (Rotation)
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180 deg/set
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Z-Axis (Up/Down)
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300 mm/sec
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W-Axis (Flipping)
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180 deg/sec
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Minimum Rotation Diameter
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640 mm
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Cleanliness
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ISO class 10
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Payload
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0.8 kg
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Utility
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Power
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AC220V ±10% 15A
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Vacuum
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-50kPa or more
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Weight
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Approx. 70kgf
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