:::::::: Robots and Design Co., Ltd. ::::::::::
 
 
:: :: Semiconductor :: Semiconductor Robot
 
  [Catesian Unit Type Robot] Catesian Unit Type Robot
  ۾ : master     ¥ : 00-00-00 00:00     ȸ : 5155    

 
  • Transfer 300mm Wafer (2~12")
  • Dual Arm type, 4 axis (including Track)
  • Wide motion range in vertical/Horizontal
  • Differential throughput depending on mode
  • Class 3 Cleanliness acquired
  • Customization avaialbe when requested
 
 
  

MODEL

RW-CT-2320

Operation Range

R1,R2-Axis (In/Out)

650mm

T-Axis (Turning)

350deg

Z-Axis (Up/Down)

910mm(FI+610~FL+1520)

X-Axis (Track)

1515mm/sec(4FOUP)

Transfer Speed

R1,R2-Axis (In/Out)

800mm/sec

T-Axis (Turning)

180deg/sec

Z-Axis (Up/Down)

700mm/sec

X-Axis (Track)

1000mm

Acceleration/

Deceleration

All-axes

0.3sec

Repeatability

R1,R2-Axis (In/Out)

0.05 mm

T-Axis (Turning)

0.05 deg

Z-Axis (Up/Down)

0.05 mm

X-Axis (Track)

0.05 mm

Actuator

All-axes

BLDC motor with abs.encoder

Load Capacity

1.0kg (including wafer hand)

Wafer Size

~12in

Wafer Presence Sensor

Wafer Gripping Sensor

Wafer mapping Sensor

None

Cleanliness

Capability by Aug 1

ISO Class 4

Capability by Oct 1

ISO Class 3

Cable Length

3m (Robot to controller)

Weight

Approx. 180kgf(Include X axis)

End-effetor

Edge Grip Type end-effector

Wafer Transfer Throughput

Mode 0

250WPH

Mode 2

290WPH



з
200mm Standard Wafer Transfer Robot 300mm Standard Wafer Transfer Robot SCARA Robot
Telescopic Robot Variable Pitch WTR Vacuum Robot
Multi-Blade Robot Wet Robot Catesian Unit Type Robot
Cylindral Robot End-effector
ȣ ̹ ۾ ¥ ȸ
9 [Telescopic Robot] TELESCOPIC TYPE WTR : 2 STEP/3 STEP
...
master 00-00 7307
8 [Multi-Blade Robot] MULTI BLADE WTR
...
master 00-00 7085
7 [Wet Robot] Overhang Robot
...
master 00-00 4392
6 [Catesian Unit Type Robot] Catesian Unit Type Robot
...
master 00-00 5156
5 [Wet Robot] Wet Robot
...
master 00-00 4449
4 [300mm Standard Wafer Transfer Robot] Wafer Transfer Robot - Single/ Dual Arm
...
master 00-00 8797
3 [Variable Pitch WTR] Variable Pitch WTR
...
master 00-00 6846
2 [Vacuum Robot] VACUUM ROBOT
...
master 00-00 6137
1 [SCARA Robot] SCARA ROBOT
...
master 00-00 5091