:::::::: Robots and Design Co., Ltd. ::::::::::
 
 
:: 사업영역/제품 :: Semiconductor :: Semiconductor Robot
 
  [Wet Robot] Wet Robot
  글쓴이 : master     날짜 : 00-00-00 00:00     조회 : 4614    

 
  • Transfer 300mm Wafer
  • Single Arm Type
  • ODM or OEM supply
  • IP 64 protection
  • End-effector : Edge Gripping type with sensor
  • Customization avaiable when requested
 
 
 
 
 
 
 
 

MODEL

RW-WT-1310

Operation range

R-axis(In/Out)

908mm

T-axis(Turning)

330deg

Z-axis(Up/Down)

100mm

Max. speed

R-axis(In/Out)

400mm/sec

T-axis(Turning)

180deg/sec

Z-axis(Up/Down)

20mm/sec

Repeatability

R-axis(In/Out)

±0.10 mm 

T-axis(Turning)

±0.02deg

Z-axis(Up/Down)

±0.05 mm 

Actuator

All-axes

BLDC motor with abs.encoder

Wafer size

~12inch

Protection

IP 64

Wafer presence Sensor

Wafer Gripping Sensor

Cable length

5m (Robot to controller)

Weight

About 50kgf

End-effector

Edge Gripping Type



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