:::::::: Robots and Design Co., Ltd. ::::::::::
 
 
:: 사업영역/제품 :: Semiconductor :: Semiconductor Robot
 
  [300mm Standard Wafer Transfer Robot] Wafer Transfer Robot - Single/ Dual Arm
  글쓴이 : master     날짜 : 00-00-00 00:00     조회 : 8797    

 
  • Transfer 300mm Wafer(2~12")
  • Clean room application
  • ODM or OEM supply
  • Single & Dual arm/ Multi Blade Type
  • Fast & Precise Motion Robot
  • 0.1 micron meter CLASS 1 Cleanliness
  • Various End-Effector : Vacuum Blade, Edge Gripper
  • Linear Track, Mapping sensor(Optional)
  • Customization available when requested  
 
 
 
 
 
 
 

MODEL

RW-SA-1210

RW-SA-1220

RW-SA-1310

RW-SA-1320

ARM

SINGLE ARM

DUAL ARM

SINGLE ARM

DUAL ARM

WAFER SIZE

200mm

300 mm

200mm

300mm

Controlled arm

3

4

Motion Range

R1, R2 axis

510 mm

645 mm

510mm

645 mm

T axis

330 deg

Z axis

220 deg

Speed

R1, R2 axis

1000 mm/sec

T axis

360deg/sec

Z axis

400mm/sec



분류
· 200mm Standard Wafer Transfer Robot· 300mm Standard Wafer Transfer Robot· SCARA Robot
· Telescopic Robot· Variable Pitch WTR· Vacuum Robot
· Multi-Blade Robot· Wet Robot· Catesian Unit Type Robot
· Cylindral Robot· End-effector
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