:::::::: Robots and Design Co., Ltd. ::::::::::
 
 
:: :: Semiconductor :: Semiconductor Robot
 
  [Variable Pitch WTR] Variable Pitch WTR
  ۾ : master     ¥ : 00-00-00 00:00     ȸ : 6846    

 
  • Pitch range is variable from min. 6mm to 16 mm during operation.
  • Used as a module for Furnace Buffer Stocker
  • Operated up to 95C temperature.
  • Easy maintenance
  • Wafer mapping is optional. For sensor, fiber sensor is used for operation under high temperature.
  • With 1 Hand, 4 blades, 5 wafers are transferred at once.
 

MODEL

RW-VP-1300

Operation Range

X-axis(In/Out)

590 mm

Z-axis(Up/Down)

1220 mm

T-axis(Turning)

240 deg

V-axis(Variable Pitch)

7.5~15.0 mm

Transfer speed

X-axis(In/Out)

250 mm/sec

Z-axis(Up/Down)

400 mm/sec

T-axis(Turning)

240 deg/sec

V-axis(Variable Pitch)

1.2 sec/cycle

Repeatability           (uni-directional)

All-axis

0.10 mm

Actuator

X-axis(In/Out)

Ac Servo Motor

Z,T,V-axis(Up/Down)

Ac Servo Motor

Load Capacity

0.5kgf

Wafer Size

2~12 inch

Wafer presence sensor

5 set Fiber optic sensor

Wafer protrusion sensor

1 set Fiber optic sensor

Wafer mapping sensor

1 set Fiber optic sensor

Human Safety sensor

Touch sensor

Max.deflection

0.1 mm

End effector

Fine ceramic wafer blade



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