:::::::: Robots and Design Co., Ltd. ::::::::::
 
 
:: »ç¾÷¿µ¿ª/Á¦Ç° :: Semiconductor :: Semiconductor Robot
 
  [Variable Pitch WTR] Variable Pitch WTR
  ±Û¾´ÀÌ : master     ³¯Â¥ : 00-00-00 00:00     Á¶È¸ : 7413    

 
  • Pitch range is variable from min. 6mm to 16 mm during operation.
  • Used as a module for Furnace Buffer Stocker
  • Operated up to 95¡ÆC temperature.
  • Easy maintenance
  • Wafer mapping is optional. For sensor, fiber sensor is used for operation under high temperature.
  • With 1 Hand, 4 blades, 5 wafers are transferred at once.
 

MODEL

RW-VP-1300

Operation Range

X-axis(In/Out)

590 mm

Z-axis(Up/Down)

1220 mm

T-axis(Turning)

240 deg

V-axis(Variable Pitch)

7.5~15.0 mm

Transfer speed

X-axis(In/Out)

250 mm/sec

Z-axis(Up/Down)

400 mm/sec

T-axis(Turning)

240 deg/sec

V-axis(Variable Pitch)

1.2 sec/cycle

Repeatability           (uni-directional)

All-axis

¡¾0.10 mm

Actuator

X-axis(In/Out)

Ac Servo Motor

Z,T,V-axis(Up/Down)

Ac Servo Motor

Load Capacity

0.5kgf

Wafer Size

2~12 inch

Wafer presence sensor

5 set Fiber optic sensor

Wafer protrusion sensor

1 set Fiber optic sensor

Wafer mapping sensor

1 set Fiber optic sensor

Human Safety sensor

Touch sensor

Max.deflection

¡Â0.1 mm

End effector

Fine ceramic wafer blade



ºÐ·ù
¡¤ 200mm Standard Wafer Transfer Robot¡¤ 300mm Standard Wafer Transfer Robot¡¤ SCARA Robot
¡¤ Telescopic Robot¡¤ Variable Pitch WTR¡¤ Vacuum Robot
¡¤ Multi-Blade Robot¡¤ Wet Robot¡¤ Catesian Unit Type Robot
¡¤ Cylindral Robot¡¤ End-effector
¹øÈ£ À̹ÌÁö Á¦¸ñ ±Û¾´ÀÌ ³¯Â¥ Á¶È¸
9 [Telescopic Robot] TELESCOPIC TYPE WTR : 2 STEP/3 STEP
...
master 00-00 8342
8 [Multi-Blade Robot] MULTI BLADE WTR
...
master 00-00 7790
7 [Wet Robot] Overhang Robot
...
master 00-00 4867
6 [Catesian Unit Type Robot] Catesian Unit Type Robot
...
master 00-00 5757
5 [Wet Robot] Wet Robot
...
master 00-00 5006
4 [300mm Standard Wafer Transfer Robot] Wafer Transfer Robot - Single/ Dual Arm
...
master 00-00 9520
3 [Variable Pitch WTR] Variable Pitch WTR
...
master 00-00 7414
2 [Vacuum Robot] VACUUM ROBOT
...
master 00-00 6795
1 [SCARA Robot] SCARA ROBOT
...
master 00-00 5786