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| [Variable Pitch WTR] Variable Pitch WTR |
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| 글쓴이 : master
날짜 : 00-00-00 00:00
조회 : 6846
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- Pitch range is variable from min. 6mm to 16 mm during operation.
- Used as a module for Furnace Buffer Stocker
- Operated up to 95°C temperature.
- Easy maintenance
- Wafer mapping is optional. For sensor, fiber sensor is used for operation under high temperature.
- With 1 Hand, 4 blades, 5 wafers are transferred at once.
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MODEL
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RW-VP-1300
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Operation Range
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X-axis(In/Out)
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590 mm
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Z-axis(Up/Down)
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1220 mm
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T-axis(Turning)
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240 deg
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V-axis(Variable Pitch)
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7.5~15.0 mm
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Transfer speed
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X-axis(In/Out)
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250 mm/sec
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Z-axis(Up/Down)
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400 mm/sec
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T-axis(Turning)
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240 deg/sec
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V-axis(Variable Pitch)
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1.2 sec/cycle
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Repeatability (uni-directional)
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All-axis
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±0.10 mm
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Actuator
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X-axis(In/Out)
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Ac Servo Motor
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Z,T,V-axis(Up/Down)
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Ac Servo Motor
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Load Capacity
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0.5kgf
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Wafer Size
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2~12 inch
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Wafer presence sensor
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5 set Fiber optic sensor
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Wafer protrusion sensor
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1 set Fiber optic sensor
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Wafer mapping sensor
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1 set Fiber optic sensor
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Human Safety sensor
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Touch sensor
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Max.deflection
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≤0.1 mm
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End effector
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Fine ceramic wafer blade
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