|
|
|
| [Variable Pitch WTR] Variable Pitch WTR |
 |
|
|
| 글쓴이 : master
날짜 : 00-00-00 00:00
조회 : 7676
|
|
- Pitch range is variable from min. 6mm to 16 mm during operation.
- Used as a module for Furnace Buffer Stocker
- Operated up to 95°C temperature.
- Easy maintenance
- Wafer mapping is optional. For sensor, fiber sensor is used for operation under high temperature.
- With 1 Hand, 4 blades, 5 wafers are transferred at once.
|
MODEL
|
RW-VP-1300
|
|
Operation Range
|
X-axis(In/Out)
|
590 mm
|
|
Z-axis(Up/Down)
|
1220 mm
|
|
T-axis(Turning)
|
240 deg
|
|
V-axis(Variable Pitch)
|
7.5~15.0 mm
|
|
Transfer speed
|
X-axis(In/Out)
|
250 mm/sec
|
|
Z-axis(Up/Down)
|
400 mm/sec
|
|
T-axis(Turning)
|
240 deg/sec
|
|
V-axis(Variable Pitch)
|
1.2 sec/cycle
|
|
Repeatability (uni-directional)
|
All-axis
|
±0.10 mm
|
|
Actuator
|
X-axis(In/Out)
|
Ac Servo Motor
|
|
Z,T,V-axis(Up/Down)
|
Ac Servo Motor
|
|
Load Capacity
|
0.5kgf
|
|
Wafer Size
|
2~12 inch
|
|
Wafer presence sensor
|
5 set Fiber optic sensor
|
|
Wafer protrusion sensor
|
1 set Fiber optic sensor
|
|
Wafer mapping sensor
|
1 set Fiber optic sensor
|
|
Human Safety sensor
|
Touch sensor
|
|
Max.deflection
|
≤0.1 mm
|
|
End effector
|
Fine ceramic wafer blade
|
|
|
|
|
|
|
