:::::::: Robots and Design Co., Ltd. ::::::::::
 
 
:: 사업영역/제품 :: Semiconductor :: Semiconductor Robot
 
  [Vacuum Robot] VACUUM ROBOT
  글쓴이 : master     날짜 : 00-00-00 00:00     조회 : 6198    

 

  • 300mm wafer Transferring Robot for vacuum application
  • Vacuum Resistance Level : - 1X10-2 Torr or less
  • Operation Temperature: 0~ 60°C (inside the Chamber), ~120°C (Process)
  • Dual Arm with 2 Arm, 4 Hands, Qual Blade
  • Wide Operation Range: 1040 mm

 

 

MODEL

RW-VS-1320

Axis Length

RR

800 mm

RL

800 mm

θ

360 deg(Indefinite)

Z

200 mm

Max. Speed

RR

225 deg/sec (1900mm/sec)

RL

225 deg/sec (1900mm/sec)

θ

225deg/sec

Z

300 mm/sec

Repeatability

±0.1mm

Min. Rotation Area

Ø850mm

Noise Generation

70dB or less

Cleanliness

ISO Class 1 (Wafer Surface)



분류
· 200mm Standard Wafer Transfer Robot· 300mm Standard Wafer Transfer Robot· SCARA Robot
· Telescopic Robot· Variable Pitch WTR· Vacuum Robot
· Multi-Blade Robot· Wet Robot· Catesian Unit Type Robot
· Cylindral Robot· End-effector
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